Product
- Quartz Material
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Material Supplier Model Product Quartz Tosoh N, NP Quartz Window
Chamber wall
Top Ring
Pumping Liner
Confinement Ring
etc.Momentive GE214
GE144Quartz Dome
Boat
Cover Ring
A7 Ring, etc.Heraeus HSQ,
TSCQuartz Tube
Dome
- Silicon Material
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Material Single Crystal Silicon Purity(%) 6N ↑ Type / Dopant P - Boron Size 8 ~ 12 inch Resistivity(Ω.cm) Low Resistivity -- < 1Ω
Normal Resistivity -- 1 - 10Ω
High Resistivity -- 60 - 90ΩSi Focus Ring 6", 8", 12" Si Electrode Hole Diameter 0.45/0.5 Surface condition Lapping
Etching
Polishing
- Ceramic Material
-
Material Al203 99.7% ↑ Density 3.96 × 103 Kg / ㎥ Hardness 1500 Kg / ㎥ Dielectric Constant 9.9 1MHz Thermal Conductivity 20℃ 32 W / m.K Heat Shock Resistivity 250 T. ℃ Average powder grain size 0.2 ~ 0.4㎛ Diameter Maximum Using Temperature 1700 -