Product

Quartz Material

Material	Supplier	Model	Product
Quartz	Tosoh	N, NP	Quartz Window Chamber wall Top Ring Pumping Liner Confinement Ring etc.
	Momentive	GE214 GE144	Quartz Dome Boat Cover Ring A7 Ring, etc.
	Heraeus	HSQ, TSC	Quartz Tube Dome

Silicon Material

Material	Single Crystal Silicon
Purity(%)	6N ↑
Type / Dopant	P - Boron
Size	8 ~ 12 inch
Resistivity(Ω.cm)	Low Resistivity -- ＜ 1Ω Normal Resistivity -- 1 - 10Ω High Resistivity -- 60 - 90Ω
Si Focus Ring	6＂, 8＂, 12＂
Si Electrode Hole	Diameter 0.45/0.5
Surface condition	Lapping Etching Polishing

Ceramic Material